Laurell Spin Coater
The WS-650Mz-23NPPB spin coater can reach up to 12000 RPM with a maximum acceleration of 13000 RPM/sec with a standard chuck. Wafers up to 150 mm diameter or 125 mm square substrates can be mounted in the 241 mm I.D. bowl-shaped chamber. The digital processor enables easy configuration of up to twenty 51-step programs.
